Systech Instruments Manufacturers of Gas Analysis Equipment for Industry
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Rapid Thermal Processing


Rapid Thermal Processing


In Rapid Thermal Processing (RTP) of semiconductors wafers, different metal compounds, such as tungsten, cobalt, platinum, aluminium or gallium, can be deposited onto the wafer by essentially baking the wafer in the presence of different gases.


model800, model900
Created by chris
Last modified 2005-02-25 01:32 PM